Lithography

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Several newly developed methods appear to be flexible alternatives for nanoscale patterning and fabrication, such as nano-imprint lithography [7–9], soft lithography [10], and atomic force microscopy (AFM) nanolithography [11,12].

  • [7] M.D. Austin, H.X. Ge, W. Wu, M.T. Li, Z.N. Yu, D. Wasserman, S.A. Lyon, S.Y. Chou, Appl. Phys. Lett. 84 (2004) 5299.
  • [8] Z.N. Yu, S.J. Schablitsky, S.Y. Chou, Appl. Phys. Lett. 74 (1999) 2381.
  • [9] C.M. Sotomayor Torres, Alternative Lithography: Unleashing the Potential of Nanotechnology, Kluwer Academic/Plenum Publishers, New York, 2003.
  • [10] B.D. Gates, G.M. Whitesides, J. Am. Chem. Soc. 125 (2003) 14986.
  • [11] C.F. Quate, Surf. Sci. 386 (1997) 259.
  • [12] E.S. Snow, P.M. Campbell, Appl. Phys. Lett. 64 (1994) 1932.
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